Futurestar has developed one of the best performing flow controllers in the market. This valve is ideal for a variety of applications such as chemical blending and dispensing or DI quick rinse metering.
The biggest area of use is on single wafer multi chamber tools for cleaning and etching.
* Compared to competition Futurestar offers a solution where each chamber can have a different flow rate of the same chemical/liquid using a single pump. Space may be another advantage with our mAV being smaller.