Brooks Air Flow Controllers isolate your process chamber pressure from exhaust pressure variations and make inherent safe operations possible. The controllers react within milliseconds on pressure changes in the exhaust pipe and keep thus your process chamber pressure stable. Good for your process, good for your operators.
The S1000/S9000 series Sentry Air Flow Controller warrant your resist spinner chamber pressure stable no matter what fluctuations you see in exhaust pipe pressure, thus securing a constant flow over your wafers to exhaust.
The S1510 keeps your process gasflow under control by instanteneous adaptation to pressure fluctuations in the exhaust; but also senses the process chamber pressure changes and sets its valve through a stepping motor within seconds at a pre-set value for fast flow control.
The VRV 2000 valve is the best investment for your wetbench; it saves on the cost of cleanroom air and makes sure that operators remain healthy by immediate response to pressure fluctuations in the exhaust line, thus preventing back flow into the process area.
To contact our Regional managers,
please select your country.
Brooks Air Flow Controllers isolate your process chamber pressure from exhaust pressure variations and make inherent safe operations possible. The controllers react within milliseconds on pressure changes in the exhaust pipe and keep thus your process chamber pressure stable. Good for your process, good for your operators.
